Jeff Kampman's twitter feed has some good links to some resources in Intel's Technology and Manufacturing Day
There are some videos & slide decks available there, but by far the coolest one I've seen is their presentation regarding some very specific features about Intel's 10nm process
, which is debuting later this year and has quite a few differences from other lithographic processes that are referred to as "10nm".
There's a lot of cool information in that slide deck, but my favorite part is on slides 9 & 10 where they have scanning electron microscope images of different transistor sizes from the first finfet parts at 22nm all the way down to 10nm. I really like that because plenty of companies love to say 10nm, but Intel shows you what they mean by 10nm.
Other cool stuff about Intel's 10nm node shrink is that they have added two new tweaks to their transistor layout that increase the transistor density but don't rely on the standard lithographic die-shrink techniques (although those are present too). First is a rearrangement of the metal contact between the transistor and the metallization layer (see slide 15). In the past the metal contact was to the side of the gates on the transistor, but now the metal contact is directly "over" (or maybe under?) the active gate, which reduces the overall footprint of the transistor. The second improvement is to reduce the number of "dummy" gate structures that were etched in the wafer to protect the "active" gates that actually operate to switch the transistor (slide 16). In Intel's prior designs it looks like two of these dummies were used on the sides of a transistor, but at 10nm Intel has reduced this down to a single dummy.
The contact over active gate and single dummy gate techniques got a buzzy marketing name of "Hyperscaling" because they increase transistor density in ways that go beyond the usual effects of a die-shrink. I'm usually not a big fan of marketing buzzwords, but when Intel gins up a marketing name to describe low-level transistor structural features, you know that they are pretty excited about what they've been able to accomplish.